Low-temperature plasma-assisted growth of optically transparent, highly oriented nanocrystalline AlN
نویسندگان
چکیده
منابع مشابه
Low temperature growth technique for nanocrystalline cuprous oxide thin films using microwave plasma oxidation of copper
K. V. Rajani a *, S. Daniels, E. McGlynn, R. P. Gandhiraman, R. Groarke and P. J. McNally School of Electronic Engineering and NCPST, Dublin City University, Dublin 9, Ireland School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland BDI, Dublin City University, Dublin 9, Ireland School of Chemical Sciences, Dublin City University, Dublin 9, Ireland School of Electronic E...
متن کاملLOW TEMPERATURE SYNTHESIS OF NANOCRYSTALLINE MgAl2O4 SPINEL VIA SUCROSE PROCESS
Abstract: Nanocrystalline MgAl2O4 spinel powder was synthesized using metal nitrates and a polymer matrix-based composed of sucrose and polyvinyl alcohol (PVA). The precursor and the calcined powders were characterized by simultaneous thermal analysis (STA), X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR), and scanning electron microscopy (SEM). According to XRD res...
متن کاملSynthesis of highly transparent ultrananocrystalline diamond films from a low-pressure, low-temperature focused microwave plasma jet
This paper describes a new low-temperature process underlying the synthesis of highly transparent ultrananocrystalline diamond [UNCD] films by low-pressure and unheated microwave plasma jet-enhanced chemical vapor deposition with Ar-1%CH4-10%H2 gas chemistry. The unique low-pressure/low-temperature [LPLT] plasma jet-enhanced growth even with added H2 and unheated substrates yields UNCD films si...
متن کاملDirect synthesis and characterization of optically transparent conformal zinc oxide nanocrystalline thin films by rapid thermal plasma CVD
We report a rapid, self-catalyzed, solid precursor-based thermal plasma chemical vapor deposition process for depositing a conformal, nonporous, and optically transparent nanocrystalline ZnO thin film at 130 Torr (0.17 atm). Pure solid zinc is inductively heated and melted, followed by ionization by thermal induction argon/oxygen plasma to produce conformal, nonporous nanocrystalline ZnO films ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2007
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.2423224